Oddly enough, my MAF was acting up because of an oxygen sensor gone bad. I replaced the sensor with a used one my mechanic had lying around (if you put in a new one you need to do all four so they have the same level of sensitivity) and the MAF problem seemed to disappear. The MAF and four O2 sensors work together in harmony. I do hope your MAF replacement takes care of your problems.
I am not sure if a fouled MAF can damage the engine or not. I know it makes it run like crap though, and that can't be good over the long haul for your engine.
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