I also have an 02, just did this a couple weeks ago. Really not too hard, check out this site, same one i used. be sure you have the torx tool. took me about 30 minutes to get everything apart and get the sensor out. spray it or replace it, snaps back in place- 2 screws.
scroll down to see the details once open on how to remove it. clear info even i was able to follow
bought the torx at Lowes, and the cleaner at autozone- total investment for me was under 10$.
http://mike.focke.googlepages.com/checkenginelightcausedbymassairflowsensor