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The MAF and the oxygen sensors work together in concert to measure the incoming fresh air and the exhaust gasses going out. Years ago, my tech educated me in the fact that you can get a failing MAF code and the MAF may be dirty, but it's not the culprit. It's one of the oxygen sensors.
I was having difficulty just like you getting rid of the CE light and then I changed out all four of my oxygen sensors and it finally was solved. Wasn't a cheap way to fix the annoying CE light, but my fuel economy and performance increased so much after just a few days of driving around that I was really happy I did it.
If your car has 75k or more on it, changing out all four oxygen sensors is probably a prudent move as they'll need them sooner than later anyway.
Hope this helps you!
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