01 S, Multiple CEL's and the rabbit hole

[fishski]

Looking for some technical help please 🙂 01 S with 28k, original owner never had a problem until last month. Have done all my own work, basically maintenance stuff like AOS, water pump, plugs, etc. CEL came on 7/31 put durametric on and codes were P0133 & P1275 both 02 sensor issues, cleared CEL and kept going. All month with steady driving no issues. 9/4 CEL put durametric on and multiple codes, P1130, P1128, P1126, P1133, P0102. Up to this point if the CEL did not come on I would have not know there was a problem as the car ran well. 9/5 CEL came back on with 1126, 1133, 0300, 0304, 0301, 0302, 0306. Did a little research online and it was general opinion to start with easy stuff so I cleaned MAF, TB and air cleaner. Upon startup after doing all this work (cleaning) car ran worse. Rough idle and engine knocking. I did not run the car long. I read after cleaning all the items to disconnect battery for about a minute then turn the key on for a minute, then turn off and let set for 10 seconds before starting. In the meantime I took out my Bentley manual and PP 101. I read the MAF section and I think I fried the MAF because I cleaned the whole sensor including "diode" looking wire on the MAP which seems to be a no, no. I did have another used one on the shelf (same part number .125) so I installed that one, did the battery and key thing again and it seems to run a little better but still rough and still have engine knock. What would have caused what I cleaned to make it worse? Looking for someone to help me wade through the process to track this problem down as I'm going further down the rabbit hole and things are getting worse. I prefer not to throw parts at it but my sense is MAF and an O2 sensor(s) could be bad. Any help would be appreciated. BTW, there is nothing you can say to me that will hurt my feelings, I know for this one I might be a bit over my head but I love learning and I'd love to get back on the road. I have a ton of tools, durametric, etc. Not a professional mechanic but very mechanical.